Effect of sample bias on backscattered ion spectroscopy in the helium ion microscope
نویسندگان
چکیده
منابع مشابه
Scanning reflection ion microscopy in a helium ion microscope
Reflection ion microscopy (RIM) is a technique that uses a low angle of incidence and scattered ions to form an image of the specimen surface. This paper reports on the development of the instrumentation and the analysis of the capabilities and limitations of the scanning RIM in a helium ion microscope (HIM). The reflected ions were detected by their "conversion" to secondary electrons on a pla...
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15 صفحه اولSecondary Electron Imaging in the Helium Ion Microscope
Secondary electrons (SE) have been for many years the most user friendly, versatile, and convenient modes of imaging in the scanning electron microscope. The Helium Ion Microscope (HIM) also generates secondary electrons (iSE) and potentially offers significant advantages compared to the conventional SEM including much enhanced spatial resolution and improved image contrast. There are, however,...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2010
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.3502667